Reactive-ion etching (RIE) is an etching technology used in microfabrication. RIE is a type of dry etching which has different characteristics than wet...

Deep reactive-ion etching (DRIE) is a special subclass of reactive-ion etching (RIE). It enables highly anisotropic etch process used to create deep penetration...

Reactive-ion etching (RIE) operates under conditions intermediate between sputter and plasma etching (between 10−3 and 10−1 Torr). Deep reactive-ion etching...

individual atoms in an ion beam to ablate a target. Reactive ion etching is an important extension that uses chemical reactivity to enhance the physical...

for anisotropic deep-etching of diamond nanostructures by application of high bias in inductively coupled plasma/reactive ion etching (ICP/RIE) reactor....

Such anisotropy is maximized in deep reactive ion etching (DRIE). The use of the term anisotropy for plasma etching should not be conflated with the use...

(PFS) are promising as barrier materials in plasma-assisted reactive ion etching. Due to the presence of iron and silicon in the main chain, the polymer...

side effect of reactive ion etching (RIE). Other methods for forming a similar structure include electrochemical etching, stain etching, metal-assisted...

of dry etching is reactive-ion etching. Unlike with many (but not all, see isotropic etching) of the wet chemical etchants used in wet etching, the dry...

Look up rie in Wiktionary, the free dictionary. RIE may refer to: Reactive-ion etching, as an acronym Rie, a Japanese and Dutch given name The Royal Infirmary...

Pressure-Plasma Activated Bonding (LP-PAB) Reactive ion etching (RIE) Inductively coupled plasma reactive-ion etching (ICP RIE) Sequential plasma activated...

accurate the pattern is transferred from the stencil to the substrate. Reactive ion etching is based on ionized, accelerated particles that etch both chemically...

sputter deposition, plasma iondoping, vacuum plasmaspraying, and reactive ion etching. National Research Council (1991). Plasma Processing of Materials:...

removed. Etching techniques include: Dry etching (plasma etching) such as reactive-ion etching (RIE) or deep reactive-ion etching (DRIE) Wet etching or chemical...

rise to the level of breaking down the gate oxide. In particular, reactive-ion etching of the first metal layer can result in exactly the situation shown...

physicochemical methods, the electrochemical etching method is one of the most popular methods. Etching is a two or more step procedure. The "zone electropolishing"...

conductivity) Etching (microfabrication) Dry etching (plasma etching) Reactive-ion etching (RIE) Deep reactive-ion etching (DRIE) Atomic layer etching (ALE) Plasma...

material is perpendicular to the layers. Anisotropic etching techniques (such as deep reactive-ion etching) are used in microfabrication processes to create...

dose and focus latitudes required for curing, and resistance to reactive ion etching.: 966  Other key properties are sensitivity, compatibility with tetramethylammonium...

alternating reaction with chlorine and etching with argon ions. This is a better-controlled process than reactive ion etching, though the issue with commercial...

ion milling or ion etching. Sputtering can also play a role in reactive-ion etching (RIE), a plasma process carried out with chemically active ions and...

spontaneous emission or superluminescence Advanced silicon etching, a deep reactive ion etching Accredited Solutions Expert, Hewlett Packard Enterprise Company...

substrate. This type of etching is inexpensive and is generally used in early, low-budget research. Deep reactive-ion etching "Microengineering -- Bulk...

operate in the gas-phase such as reactive ion etching. These methods require expensive equipment compared to simple wet etching. MACE, in principle allows the...

include the LIGA fabrication process, advanced silicon etch, and deep reactive ion etching. LIGA Micromechanical systems — high aspect ratio (HAR) micromachining...

spectroscopy. ICP-MS, a type of mass spectrometry. ICP-RIE, a type of reactive-ion etching. Another benefit of ICP discharges is that they are relatively free...

self-biased electrode. These energetic ions are exploited in many microfabrication processes (see reactive-ion etching (RIE)) by placing a substrate on the...

industry collaboration, driving manufacturing efficiency and pioneering reactive ion etching, as well as for manufacturing process flows for logic and memory...

J., May, G. S., & Park, D. C. (2003). Neural network modeling of reactive ion etching using optical emission spectroscopy data. IEEE Transactions on Semiconductor...

Electromigration is the transport of material caused by the gradual movement of the ions in a conductor due to the momentum transfer between conducting electrons...