Deep reactive-ion etching (DRIE) is a special subclass of reactive-ion etching (RIE). It enables highly anisotropic etch process used to create deep penetration...
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Reactive-ion etching (RIE) is an etching technology used in microfabrication. RIE is a type of dry etching which has different characteristics than wet...
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MEMS (section Etching processes)
Reactive-ion etching (RIE) operates under conditions intermediate between sputter and plasma etching (between 10−3 and 10−1 Torr). Deep reactive-ion etching...
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individual atoms in an ion beam to ablate a target. Reactive ion etching is an important extension that uses chemical reactivity to enhance the physical...
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for anisotropic deep-etching of diamond nanostructures by application of high bias in inductively coupled plasma/reactive ion etching (ICP/RIE) reactor....
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Black silicon (section Reactive-ion etching)
side effect of reactive ion etching (RIE). Other methods for forming a similar structure include electrochemical etching, stain etching, metal-assisted...
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of dry etching is reactive-ion etching. Unlike with many (but not all, see isotropic etching) of the wet chemical etchants used in wet etching, the dry...
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(PFS) are promising as barrier materials in plasma-assisted reactive ion etching. Due to the presence of iron and silicon in the main chain, the polymer...
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Such anisotropy is maximized in deep reactive ion etching (DRIE). The use of the term anisotropy for plasma etching should not be conflated with the use...
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Look up rie in Wiktionary, the free dictionary. RIE may refer to: Reactive-ion etching, as an acronym Rie, a Japanese and Dutch given name The Royal Infirmary...
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Pressure-Plasma Activated Bonding (LP-PAB) Reactive ion etching (RIE) Inductively coupled plasma reactive-ion etching (ICP RIE) Sequential plasma activated...
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Stencil lithography (section Etching)
accurate the pattern is transferred from the stencil to the substrate. Reactive ion etching is based on ionized, accelerated particles that etch both chemically...
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sputter deposition, plasma iondoping, vacuum plasmaspraying, and reactive ion etching. National Research Council (1991). Plasma Processing of Materials:...
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Microfabrication (section Etching)
removed. Etching techniques include: Dry etching (plasma etching) such as reactive-ion etching (RIE) or deep reactive-ion etching (DRIE) Wet etching or chemical...
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physicochemical methods, the electrochemical etching method is one of the most popular methods. Etching is a two or more step procedure. The "zone electropolishing"...
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self-biased electrode. These energetic ions are exploited in many microfabrication processes (see reactive-ion etching (RIE)) by placing a substrate on the...
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rise to the level of breaking down the gate oxide. In particular, reactive-ion etching of the first metal layer can result in exactly the situation shown...
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conductivity) Etching (microfabrication) Dry etching (plasma etching) Reactive-ion etching (RIE) Deep reactive-ion etching (DRIE) Atomic layer etching (ALE) Plasma...
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material is perpendicular to the layers. Anisotropic etching techniques (such as deep reactive-ion etching) are used in microfabrication processes to create...
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spontaneous emission or superluminescence Advanced silicon etching, a deep reactive ion etching Accredited Solutions Expert, Hewlett Packard Enterprise Company...
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alternating reaction with chlorine and etching with argon ions. This is a better-controlled process than reactive ion etching, though the issue with commercial...
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dose and focus latitudes required for curing, and resistance to reactive ion etching.: 966 Other key properties are sensitivity, compatibility with tetramethylammonium...
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Sputtering (section Etching and chemical sputtering)
ion milling or ion etching. Sputtering can also play a role in reactive-ion etching (RIE), a plasma process carried out with chemically active ions and...
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substrate. This type of etching is inexpensive and is generally used in early, low-budget research. Deep reactive-ion etching "Microengineering -- Bulk...
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Bosch process may refer to: Bosch deep reactive-ion etching, a microfabrication technique to form high aspect ratio features. Haber–Bosch process, ammonia...
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industry collaboration, driving manufacturing efficiency and pioneering reactive ion etching, as well as for manufacturing process flows for logic and memory...
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Inductively coupled plasma (category Ion source)
spectroscopy. ICP-MS, a type of mass spectrometry. ICP-RIE, a type of reactive-ion etching. Another benefit of ICP discharges is that they are relatively free...
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Electromigration is the transport of material caused by the gradual movement of the ions in a conductor due to the momentum transfer between conducting electrons...
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of microbump with embedded thin-film thermoelectric material deep reactive-ion etching (DRIE) – process that creates deep, steep-sided holes and trenches...
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Advanced Silicon Etching (ASE) is a deep reactive-ion etching (DRIE) technique to etch deep and high aspect ratio structures in silicon. ASE was created...
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