• Atomic layer epitaxy (ALE), more generally known as atomic layer deposition (ALD), is a specialized form of thin film growth (epitaxy) that typically...
    5 KB (581 words) - 18:37, 25 June 2025
  • advanced thin-film technology. Suntola named it atomic layer epitaxy (ALE) based on the meaning of "epitaxy" in Greek language, "arrangement upon". The first...
    65 KB (7,440 words) - 04:51, 17 February 2025
  • Thumbnail for Epitaxy
    Epitaxy (prefix epi- means "on top of”) is a type of crystal growth or material deposition in which new crystalline layers are formed with one or more...
    30 KB (3,623 words) - 17:56, 29 May 2025
  • Riikka L. (2014-12-01). "A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy". Chemical Vapor Deposition. 20 (10–11–12):...
    2 KB (223 words) - 20:33, 23 August 2023
  • manufacturers in fabrication plants for processes such as atomic layer deposition, epitaxy, chemical vapor deposition, and diffusion. The company was...
    18 KB (1,767 words) - 10:27, 28 May 2025
  • Thumbnail for Chemical vapor deposition
    temperatures. Atomic-layer CVD (ALCVD) – Deposits successive layers of different substances to produce layered, crystalline films. See Atomic layer epitaxy. Combustion...
    42 KB (5,024 words) - 09:19, 23 June 2025
  • deposit materials in a layer by layer fashion, was later independently developed by Tuomo Suntola under the name atomic layer epitaxy. "Валентин Борисович...
    8 KB (699 words) - 05:30, 2 June 2025
  • Thin film (redirect from Multi-layer)
    film. Many growth methods rely on nucleation control such as atomic-layer epitaxy (atomic layer deposition). Nucleation can be modeled by characterizing surface...
    76 KB (9,744 words) - 22:28, 23 June 2025
  • Thumbnail for Tuomo Suntola
    company Instrumentarium Oy. He introduced the atomic layer epitaxy (ALE) technology, nowadays known as atomic layer deposition (ALD), as the solution for the...
    10 KB (1,174 words) - 01:50, 31 May 2025
  • Thumbnail for Metalorganic vapour-phase epitaxy
    for growing crystalline layers to create complex semiconductor multilayer structures. In contrast to molecular-beam epitaxy (MBE), the growth of crystals...
    12 KB (1,318 words) - 00:28, 28 March 2025
  • computation. The wetting layer is epitaxially grown on a surface using molecular beam epitaxy (MBE). The temperatures required for wetting layer growth typically...
    5 KB (620 words) - 09:09, 8 February 2024
  • 1016/j.jcrysgro.2006.10.018. Suntola T, Hyvarinen J (August 1985). "Atomic Layer Epitaxy". Annual Review of Materials Science. 15 (1): 177–195. Bibcode:1985AnRMS...
    65 KB (8,541 words) - 00:41, 10 June 2025
  • Chemical beam epitaxy (CBE) forms an important class of deposition techniques for semiconductor layer systems, especially III-V semiconductor systems...
    12 KB (1,661 words) - 15:45, 13 May 2025
  • Thumbnail for Molecular-beam epitaxy
    Molecular-beam epitaxy (MBE) is an epitaxy method for thin-film deposition of single crystals. MBE is widely used in the manufacture of semiconductor...
    14 KB (1,527 words) - 04:31, 26 May 2025
  • Thumbnail for Piezoelectric sensor
    manufactured utilizing sputtering, CVD (chemical vapour deposition), ALD (atomic layer epitaxy) etc. methods. Thin film piezoelectric materials are used in applications...
    22 KB (2,378 words) - 04:16, 21 June 2025
  • Thumbnail for Markku Leskelä
    Centre of Finland. Markku Leskelä started ALD research (then called atomic layer epitaxy) in the early 1980s at Helsinki University of Technology (nowadays...
    2 KB (149 words) - 13:15, 15 February 2025
  • Thumbnail for Gallium acetylacetonate
    tris(acetylacetonate)s. Gallium oxide thin films can be produced by atomic layer epitaxy (ALE) by combining gallium acetylacetonate with either water or ozone...
    3 KB (223 words) - 07:53, 28 December 2024
  • Thumbnail for Semiconductor device fabrication
    (MOCVD), used in LEDs Atomic layer deposition (ALD) Physical vapor deposition (PVD) Sputtering Evaporation Epitaxy Molecular beam epitaxy (MBE) Ion beam deposition...
    113 KB (11,851 words) - 15:31, 13 June 2025
  • Riikka L. (1 December 2014). "A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy". Chemical Vapor Deposition. 20 (10–11–12):...
    99 KB (11,350 words) - 17:40, 23 June 2025
  • vapor deposition (MOCVD), wet wafer processing, molecular beam epitaxy (MBE), atomic layer deposition (ALD), physical vapor deposition (PVD), dicing and...
    19 KB (1,924 words) - 10:10, 18 June 2025
  • productive nanosystems: including top-down approaches like Patterned atomic layer epitaxy and Diamondoid Mechanosynthesis. There are also bottom-up approaches...
    6 KB (638 words) - 00:01, 14 June 2025
  • material made by epitaxial growth (epitaxy) for use in photonics, microelectronics, spintronics, or photovoltaics. The epi layer may be the same material as...
    12 KB (1,262 words) - 01:54, 9 December 2024
  • University. She is interested in atomic-scale synthesis and imaging of quantum materials, using molecular beam epitaxy and scanning probe microscopy. Hoffman...
    12 KB (911 words) - 03:49, 9 January 2025
  • Molecular-beam epitaxy (MBE) Hydride vapor-phase epitaxy (HVPE) Liquid phase epitaxy (LPE) Metal-organic molecular-beam epitaxy (MOMBE) Atomic layer deposition...
    54 KB (2,525 words) - 16:50, 24 May 2025
  • Soitec (section Epitaxy)
    Soitec has epitaxy expertise in III-IV materials across the following fields: molecular beam epitaxy, metal organic vapor phase epitaxy and hydride vapor...
    15 KB (1,655 words) - 11:21, 16 April 2025
  • Thumbnail for Pulsed laser deposition
    Tadashi; Gonda, Satoshi; Yoshimoto, Mamoru (1991-05-06). "Ceramic layer epitaxy by pulsed laser deposition in an ultrahigh vacuum system". Applied Physics...
    21 KB (2,603 words) - 02:05, 28 December 2024
  • in CVD, called Epitaxy or Epitaxial Layer Deposition or Vapor-Phase Epitaxy (VPE), has only a single-crystal form as the deposited layer. This process...
    98 KB (10,664 words) - 13:29, 8 June 2025
  • Thumbnail for Nanotechnology
    magnetoresistance-based hard drives already on the market fit this description, as do atomic layer deposition (ALD) techniques. Peter Grünberg and Albert Fert received...
    71 KB (7,194 words) - 15:34, 24 June 2025
  • stability of the absorber. Graphene is a single two-dimensional (2D) atomic layer of carbon atom arranged in a hexagonal lattice. Although as an isolated...
    23 KB (3,051 words) - 18:54, 9 June 2024
  • liquid-phase epitaxy (e.g. FeBO3, β-BaB2O4), electron-beam evaporation (e.g. CrBO3, β-BaB2O4), pulsed laser deposition (e.g. β-BaB2O4,  Eu(BO2)3), and atomic layer...
    24 KB (2,658 words) - 16:15, 25 May 2025