Atomic layer epitaxy (ALE), more generally known as atomic layer deposition (ALD), is a specialized form of thin film growth (epitaxy) that typically...
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advanced thin-film technology. Suntola named it atomic layer epitaxy (ALE) based on the meaning of "epitaxy" in Greek language, "arrangement upon". The first...
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Epitaxy (prefix epi- means "on top of”) is a type of crystal growth or material deposition in which new crystalline layers are formed with one or more...
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Riikka L. (2014-12-01). "A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy". Chemical Vapor Deposition. 20 (10–11–12):...
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manufacturers in fabrication plants for processes such as atomic layer deposition, epitaxy, chemical vapor deposition, and diffusion. The company was...
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Chemical vapor deposition (redirect from Atomic Layer CVD)
temperatures. Atomic-layer CVD (ALCVD) – Deposits successive layers of different substances to produce layered, crystalline films. See Atomic layer epitaxy. Combustion...
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deposit materials in a layer by layer fashion, was later independently developed by Tuomo Suntola under the name atomic layer epitaxy. "Валентин Борисович...
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Thin film (redirect from Multi-layer)
film. Many growth methods rely on nucleation control such as atomic-layer epitaxy (atomic layer deposition). Nucleation can be modeled by characterizing surface...
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company Instrumentarium Oy. He introduced the atomic layer epitaxy (ALE) technology, nowadays known as atomic layer deposition (ALD), as the solution for the...
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for growing crystalline layers to create complex semiconductor multilayer structures. In contrast to molecular-beam epitaxy (MBE), the growth of crystals...
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computation. The wetting layer is epitaxially grown on a surface using molecular beam epitaxy (MBE). The temperatures required for wetting layer growth typically...
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1016/j.jcrysgro.2006.10.018. Suntola T, Hyvarinen J (August 1985). "Atomic Layer Epitaxy". Annual Review of Materials Science. 15 (1): 177–195. Bibcode:1985AnRMS...
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Chemical beam epitaxy (CBE) forms an important class of deposition techniques for semiconductor layer systems, especially III-V semiconductor systems...
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Molecular-beam epitaxy (MBE) is an epitaxy method for thin-film deposition of single crystals. MBE is widely used in the manufacture of semiconductor...
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manufactured utilizing sputtering, CVD (chemical vapour deposition), ALD (atomic layer epitaxy) etc. methods. Thin film piezoelectric materials are used in applications...
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Centre of Finland. Markku Leskelä started ALD research (then called atomic layer epitaxy) in the early 1980s at Helsinki University of Technology (nowadays...
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tris(acetylacetonate)s. Gallium oxide thin films can be produced by atomic layer epitaxy (ALE) by combining gallium acetylacetonate with either water or ozone...
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Semiconductor device fabrication (section Metal layers)
(MOCVD), used in LEDs Atomic layer deposition (ALD) Physical vapor deposition (PVD) Sputtering Evaporation Epitaxy Molecular beam epitaxy (MBE) Ion beam deposition...
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Riikka L. (1 December 2014). "A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy". Chemical Vapor Deposition. 20 (10–11–12):...
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vapor deposition (MOCVD), wet wafer processing, molecular beam epitaxy (MBE), atomic layer deposition (ALD), physical vapor deposition (PVD), dicing and...
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productive nanosystems: including top-down approaches like Patterned atomic layer epitaxy and Diamondoid Mechanosynthesis. There are also bottom-up approaches...
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material made by epitaxial growth (epitaxy) for use in photonics, microelectronics, spintronics, or photovoltaics. The epi layer may be the same material as...
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University. She is interested in atomic-scale synthesis and imaging of quantum materials, using molecular beam epitaxy and scanning probe microscopy. Hoffman...
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Molecular-beam epitaxy (MBE) Hydride vapor-phase epitaxy (HVPE) Liquid phase epitaxy (LPE) Metal-organic molecular-beam epitaxy (MOMBE) Atomic layer deposition...
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Tadashi; Gonda, Satoshi; Yoshimoto, Mamoru (1991-05-06). "Ceramic layer epitaxy by pulsed laser deposition in an ultrahigh vacuum system". Applied Physics...
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Graphene production techniques (section Epitaxy)
in CVD, called Epitaxy or Epitaxial Layer Deposition or Vapor-Phase Epitaxy (VPE), has only a single-crystal form as the deposited layer. This process...
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magnetoresistance-based hard drives already on the market fit this description, as do atomic layer deposition (ALD) techniques. Peter Grünberg and Albert Fert received...
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stability of the absorber. Graphene is a single two-dimensional (2D) atomic layer of carbon atom arranged in a hexagonal lattice. Although as an isolated...
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liquid-phase epitaxy (e.g. FeBO3, β-BaB2O4), electron-beam evaporation (e.g. CrBO3, β-BaB2O4), pulsed laser deposition (e.g. β-BaB2O4, Eu(BO2)3), and atomic layer...
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