Deep reactive-ion etching (DRIE) is a special subclass of reactive-ion etching (RIE). It enables highly anisotropic etch process used to create deep penetration...

Reactive-ion etching (RIE) is an etching technology used in microfabrication. RIE is a type of dry etching which has different characteristics than wet...

Reactive-ion etching (RIE) operates under conditions intermediate between sputter and plasma etching (between 10−3 and 10−1 Torr). Deep reactive-ion etching...

Such anisotropy is maximized in deep reactive ion etching (DRIE). The use of the term anisotropy for plasma etching should not be conflated with the...

side effect of reactive ion etching (RIE). Other methods for forming a similar structure include electrochemical etching, stain etching, metal-assisted...

material is perpendicular to the layers. Anisotropic etching techniques (such as deep reactive-ion etching) are used in microfabrication processes to create...

for anisotropic deep-etching of diamond nanostructures by application of high bias in inductively coupled plasma/reactive ion etching (ICP/RIE) reactor...

conductivity) Etching (microfabrication) Dry etching (plasma etching) Reactive-ion etching (RIE) Deep reactive-ion etching (DRIE) Atomic layer etching (ALE) Plasma...

spontaneous emission or superluminescence Advanced silicon etching, a deep reactive ion etching Accredited Solutions Expert, Hewlett Packard Enterprise Company...

Bosch process may refer to: Bosch deep reactive-ion etching, a microfabrication technique to form high aspect ratio features. Haber–Bosch process, ammonia...

electrothermal actuators include deep X-ray lithography, LIGA (lithography, electroplating, and molding), and deep reactive ion etching (DRIE). These techniques...

include the LIGA fabrication process, advanced silicon etch, and deep reactive ion etching. LIGA Micromechanical systems — high aspect ratio (HAR) micromachining...

removed. Etching techniques include: Dry etching (plasma etching) such as reactive-ion etching (RIE) or deep reactive-ion etching (DRIE) Wet etching or chemical...

with embedded thin-film thermoelectric material deep reactive-ion etching (DRIE) – process that creates deep, steep-sided holes and trenches in a wafer or...

Alcatel Micro Machining Systems (AMMS) was a French manufacturer of Deep Reactive Ion Etching systems. The company's headquarters were located in Annecy, France...

of dry etching is reactive-ion etching. Unlike with many (but not all, see isotropic etching) of the wet chemical etchants used in wet etching, the dry...

substrate. This type of etching is inexpensive and is generally used in early, low-budget research. Deep reactive-ion etching "Microengineering -- Bulk...

processes such as deep reactive-ion etching. A small fraction of the SF 6 breaks down in the plasma into sulfur and fluorine, with the fluorine ions performing...

inch wafers and has advanced technical capabilities including deep reactive ion etching (DRIE) and plasma enhanced fusion bonding.[clarification needed]...

Advanced Silicon Etching (ASE) is a deep reactive-ion etching (DRIE) technique to etch deep and high aspect ratio structures in silicon. ASE was created...

include photolithography/electron beam lithography, plasma etching, deep reactive ion etching (DRIE), chemical vapor deposition (CVD), and micro-molding...

Conventional micromachining techniques such as wet etching, dry etching, deep reactive ion etching, sputtering, anodic bonding, and fusion bonding have...

UV light exposure is applied but can also be achieved through deep reactive-ion etching (DRIE). During coating and structuring of the SU-8 the tempering...

Establishment (RARDE) in 1962 The Aspect Ratio Dependent Etching effect found in Deep reactive-ion etching. This disambiguation page lists articles associated...

Japan, and its product line can be divided into three categories: Plasma etching systems (RIE, ICP, DRIE) Plasma deposition systems (PECVD and LS-CVD®)...

remaining resistance after etching, channels are given hydrophilic treatment using oxygen plasma or deep reactive-ion etching(DRIE). V-groove, unlike U-groove...

Award: Dr. Franz Laermer and Andrea Urban for the invention of the deep reactive ion etching process (Bosch Process), a key process for manufacturing semiconductor...

ion milling or ion etching. Sputtering can also play a role in reactive-ion etching (RIE), a plasma process carried out with chemically active ions and...

such as stainless steel or titanium. Laser micro-drilling or deep reactive ion etching (DRIE) are the manufacturing tools used to fabricate the hollow...

techniques and photolithography and deep reactive ion etching (DRIE) of silicon wafers to create nanochannels with backside etching of a reservoir for loading...