A turbomolecular pump is a type of vacuum pump, superficially similar to a turbopump, used to obtain and maintain high vacuum. These pumps work on the...

molecular drag pump. The turbomolecular pump invented in the 1950s, is a more advanced version based on similar operation, and a Holweck pump is often used...

of vacuum pump, including the molecular drag pump, the diffusion pump, and the turbomolecular pump. Pumps can be broadly categorized according to three...

diffusion pump outlet, where they are compressed to ambient pressure by the secondary mechanical forepump and exhausted. Unlike turbomolecular pumps and cryopumps...

rotary compression pump cheap and it is widely used as a low vacuum pump, or a backing pump to a diffusion pump or turbomolecular pump. Rotary vane pump...

10−11 mbar. In contrast to other common UHV pumps, such as turbomolecular pumps and diffusion pumps, ion pumps have no moving parts and use no oil. They...

observable evidence that rules out the possibility of vacuum". The suction pump was described by Arab engineer Al-Jazari in the 13th century, and later appeared...

Stokes piston pump operations, and Hibon Inc for £12.8 million from Smiths Group. In 2002, they purchased Seiko Industry's turbomolecular pump manufacturing...

invents the principle of the dilution refrigerator 1955 – Willi Becker turbomolecular pump concept 1956 – G.K. Walters, W.M. Fairbank, discovery of phase separation...

used in the Zippe-type centrifuge, for uranium enrichment and in turbomolecular pumps, where oil-lubricated bearings would be a source of contamination...

difference between feed and permeate stream in Ultrafiltration Turbomolecular pump, a high vacuum pump This disambiguation page lists articles associated with...

components (typically turbomolecular pumps and valves) and damage them. Many chambers containing TSPs also have an ion pump. Often the ion pump provides a good...

joining the screen and funnel. The pump used is a turbomolecular pump or a diffusion pump. Formerly mercury vacuum pumps were also used. After baking, the...

at low pressures. Pumps commonly used in this second stage to achieve UHV include: Turbomolecular pumps (especially compound pumps which incorporate a...

pumping system that began in 1994 was completed. In particular, twelve turbomolecular pumps with oil bearings and four oil sealed rotary vacuum pumps...

special sorption pumps, ion pumps and momentum transfer pumps i.e. turbomolecular pumps are used. Free molecular flow occurs in various processes such as...

rough-turbo pump configurations similar to lab-scale instruments have been developed to be compatible with MMS. For high-vacuum pumping, turbomolecular pumps are...

Infraserv Vakuumservice GmbH of Germany in order to strengthen their turbomolecular pump sales and service capabilities in Europe. In 2017, Shimadzu acquired...

more powerful vacuum systems, most often turbomolecular pumps. Older instruments may have used oil diffusion pumps for high vacuum regions. Before mass separation...

chemical vapor deposition. Equipment with diffusion pumps was replaced with those using turbomolecular pumps as the latter do not use oil which often contaminated...

a single secondary electron multiplier is used for ion counting. Turbomolecular pumps evacuate the entire beam path of the SHRIMP to maximise transmission...

pressure difference is maintained by three 500 L/s titanium ion and 4 turbomolecular pumps. The helium targets are contained in a 35 mm diameter vessel made...

MOCVD, MBE and CBE can be seen in figure 1. A combination of turbomolecular and cryo pumps are used in standard UHV growth chambers. The chamber itself...

sample. Common UHV pumps include turbomolecular and ion pumps, with roughing pumping typically performed using a rotary vane pump. Due to the extreme...

external cooling system. Turbomolecular or diffusion pumps allow for particles to be evacuated from the bulk volume and cryogenic pumps, consisting of a liquid...

the range of 10−8 to 10−9 Pa. This requires the use of turbomolecular or cryogenic vacuum pumps. The crystal manipulator allows for at least three different...