• Interference lithography (or holographic lithography) is a technique that uses coherent light (such as light from a laser) for patterning regular arrays...
    11 KB (1,360 words) - 16:06, 5 January 2025
  • Thumbnail for Nanoimprint lithography
    Nanoimprint lithography (NIL) is a method of fabricating nanometer-scale patterns. It is a simple nanolithography process with low cost, high throughput...
    33 KB (3,947 words) - 20:39, 9 June 2025
  • to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching" (PDF). 14th International Conference on Miniaturized...
    11 KB (1,181 words) - 05:01, 9 June 2025
  • extreme precision, achieved through the technique of scanning beam interference lithography (SBIL). The director of the project, Mark L. Schattenburg, began...
    10 KB (1,273 words) - 03:44, 27 May 2025
  • another Interference engine Interference fit, in engineering Interference lithography, in optics Thin-film interference, in optics Wave interference, in physics...
    2 KB (293 words) - 04:25, 9 December 2024
  • Thumbnail for Wave interference
    Haidinger fringes Interference lithography Interference visibility Interferometer Lloyd's Mirror Moiré pattern Multipath interference Newton's rings Optical...
    34 KB (4,646 words) - 08:54, 25 May 2025
  • 1999, the MCC system was advanced for use in MEMS manufacturing. Interference lithography or holographic exposures are not maskless processes and therefore...
    16 KB (1,995 words) - 15:31, 27 May 2025
  • Photolithography (also known as optical lithography) is a process used in the manufacturing of integrated circuits. It involves using light to transfer...
    59 KB (6,439 words) - 21:11, 24 June 2025
  • interference lithography (LIL), electron beam lithography, and focused ion beam lithography. Several process are available using stencil lithography:...
    6 KB (884 words) - 13:32, 5 March 2025
  • Thumbnail for Extreme ultraviolet lithography
    Extreme ultraviolet lithography (EUVL, also known simply as EUV) is a technology used in the semiconductor industry for manufacturing integrated circuits...
    125 KB (14,643 words) - 00:20, 19 June 2025
  • Thumbnail for Electron-beam lithography
    Electron-beam lithography (often abbreviated as e-beam lithography or EBL) is the practice of scanning a focused beam of electrons to draw custom shapes...
    38 KB (4,736 words) - 02:29, 26 May 2025
  • Thumbnail for Immersion lithography
    printed by immersion lithography had reached zero level capability. As of 2000, Polarization effects due to high angles of interference in the photoresist...
    10 KB (1,056 words) - 17:27, 24 May 2025
  • Thumbnail for Microarray
    these reagent solutions identically. Lithography combines various methods like Photolithography, Interference lithography, laser writing, electron-beam and...
    15 KB (1,691 words) - 21:08, 4 June 2025
  • Contact lithography, also known as contact printing, is a form of photolithography whereby the image to be printed is obtained by illumination of a photomask...
    15 KB (1,938 words) - 19:39, 4 June 2025
  • fabricated using a lot of methods like two-photon photolithography, interference lithography and molding. But 3D structuring using these techniques is very...
    14 KB (1,934 words) - 05:59, 24 May 2025
  • Claus-Michael; Bakowsky, Udo; Mücklich, Frank (2005-05-01). "Laser interference lithography as a new and efficient technique for micropatterning of biopolymer...
    28 KB (3,290 words) - 19:48, 5 February 2025
  • Computational lithography (also known as computational scaling) is the set of mathematical and algorithmic approaches designed to improve the resolution...
    13 KB (1,502 words) - 20:40, 3 May 2025
  • Thumbnail for Interferometry
    FGS are interferometers) Holography Interferometric visibility Interference lithography List of types of interferometers Ramsey interferometry Seismic...
    95 KB (10,986 words) - 18:50, 19 June 2025
  • Thumbnail for Holography
    sample. The principle of electron holography can also be applied to interference lithography. Acoustic holography enables sound maps of an object to be generated...
    67 KB (8,023 words) - 19:20, 22 June 2025
  • Thumbnail for Multiple patterning
    Multiple patterning (category Lithography (microfabrication))
    Vala; Jiri Homola (2014). "Flexible method based on four-beam interference lithography for fabrication of large areas of perfectly periodic plasmonic...
    70 KB (7,685 words) - 06:09, 6 June 2025
  • technologies such as evanescent near-field lithography, near-field interference lithography, and phase-shifting mask lithography were developed to overcome the diffraction...
    97 KB (11,288 words) - 20:44, 22 May 2025
  • Thumbnail for Catenary
    resonant underlayers and resonant overlayer designs for ultra-high NA interference lithography". JOSA A. 34 (12): 2243–2249. Bibcode:2017JOSAA..34.2243B. doi:10...
    51 KB (6,963 words) - 00:24, 2 April 2025
  • Microlithography (category Lithography (microfabrication))
    Electron beam lithography, using a steerable electron beam. Nanoimprinting Interference lithography Magnetolithography Scanning probe lithography Surface-charge...
    3 KB (347 words) - 00:21, 6 January 2025
  • sample. The principle of electron holography can also be applied to interference lithography. Gabor, D. (1948). "A New Microscopic Principle". Nature. 161 (4098)...
    7 KB (795 words) - 06:05, 29 January 2025
  • The Space Nanotechnology Laboratory performs research in interference lithography and diffraction grating fabrication. It has fabricated the high energy...
    586 bytes (54 words) - 05:38, 19 October 2023
  • Plasmonic nanolithography (also known as plasmonic lithography or plasmonic photolithography) is a nanolithographic process that utilizes surface plasmon...
    13 KB (1,223 words) - 11:11, 15 March 2025
  • Thumbnail for Photonic metamaterial
    techniques include electron beam lithography, nanostructuring with a focused ion beam and interference lithography. In 2014 a polarization-insensitive...
    45 KB (4,386 words) - 09:50, 21 June 2025
  • photonic crystals and new fabrication techniques such as multi-beam interference lithography and colloidal self-assembly, complex fluids and soft condensed...
    10 KB (927 words) - 01:10, 26 October 2024
  • Thumbnail for Phase-shift mask
    Phase-shift mask (category Lithography (microfabrication))
    Phase-shift masks are photomasks that take advantage of the interference generated by phase differences to improve image resolution in photolithography...
    7 KB (805 words) - 13:59, 2 July 2023
  • Vol16, No9, 2008, p 6173 "Partially coherent extreme ultraviolet interference lithography for 16 nm patterning research" Applied Physics Letters Volume 93...
    7 KB (655 words) - 22:45, 23 May 2025